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First presentation of new series
Since 1868 Aerzener Maschinenfabrik GmbH has manufactured blowers and is known as one of the oldest and biggest manufacturers worldwide. In Europe Aerzener Maschinenfabrik has a market leading position and in vacuum technology Aerzen can look back on 60 years of experience. The well-known vacuum blowers have been extended by a new series where the drive is carried out via canned motor. The new Aerzen blowers with canned motor, series CM are designed for the conveyance of air and neutral but also reactive gases. The blowers find special application in the industrial vacuum technology, in the semi-conductor technology, micro-electronics, manufacture of flat screens and others. The blowers cover with a total of 14 sizes nominal intake volume flows from 105 m³/h to 15.330 m³/h and pressure ranges up to absolute pressures of 10–5 mbar.
The Aerzen vacuum blowers are distinguished by O-ring sealings at the housing flanges, vacuum-tightness and air cooling of blower stage. As oil lubrication splash lubrication is applied. The selected oil is mineral and PFPE-oil which is applied in semiconductor technology. The sealing of drive shaft is carried out by integrated canned motor, so that the shaft passage to atmosphere is not necessary any longer. The motor can be applied as high-frequency design with a maximum speed of 7.400 rpm (125 c/s) and a corresponding frequency converter or as system frequency design with a maximum speed of 2.970 rpm (50 c/s) resp. 3.565 rpm (60 c/s). The canned material consists of a special, corrosion-resistant stainless steel which had been tested successfully in a long-term material test with aggressive media of semi-conductor technology. Depending on type of process two different high-frequency motor variants can be applied. For continuous operation motors with a load of 50 mbar are available, for cyclic operation motors are used which have a load of up to 150 mbar, so that shorter pumping periods can be realized.
The main advantages of the new vacuum blowers are the optimum selection possibilities by the world’s biggest canned motor series as well as by 4 additional motor variants. In addition, Aerzen blowers distinguish from all others by a high mechanical load (up to 150 mbar) making possible a considerable decrease of pumping-out periods. The water cooling of the motor of Aerzen canned blowers also guarantees the application under clean-room conditions.
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